US Patent 9318311 Plasma cell for laser-sustained plasma light source
Patent 9318311 was granted and assigned to KLA-Tencor on April, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 9, 2012
Date of Patent
April 19, 2016
Patent Applicant
Patent Application Number
13647680
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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