US Patent 9335231 Micro-Pirani vacuum gauges
Patent 9335231 was granted and assigned to MKS Instruments on May, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 25, 2014
0
Date of Patent
May 10, 2016
0
Patent Application Number
14224927
0
Patent Inventor Names
Ole Wenzel
0
Stephen F. Bart
0
Lei Gu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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