US Patent 9337260 Shallow trench isolation in bulk substrate
Patent 9337260 was granted and assigned to United Microelectronics Corporation on May, 2016 by the United States Patent and Trademark Office.
Is a
Date Filed
November 21, 2014
Date of Patent
May 10, 2016
Patent Application Number
14549559
Patent Citations Received
Patent Inventor Names
En-Chiuan Liou
0
Po-Chao Tsao
0
Chia-Jui Liang
0
Jia-Rong Wu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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