US Patent 9347872 Meta-model based measurement refinement
Patent 9347872 was granted and assigned to KLA-Tencor on May, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 23, 2014
0
Date of Patent
May 24, 2016
0
Patent Applicant
Patent Application Number
14493863
0
Patent Citations Received
Patent Inventor Names
Leonid Poslavsky
0
Lie-Quan Lee
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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