Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 24, 2016
Patent Application Number
13247847
Date Filed
September 28, 2011
Patent Citations Received
Patent Primary Examiner
Patent abstract
A cascaded electrostatic actuator can be formed from a substantially planar substrate. The cascaded electrostatic actuator can be formed in a plane of the substrate. Various embodiments are described.
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