US Patent 9362165 2D self-aligned via first process flow
Is a
Date Filed
May 8, 2015
0
Date of Patent
June 7, 2016
0
Patent Application Number
14707443
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Patent Inventor Names
Sudharshanan Raghunathan
0
Andy Wei
0
Guillaume Bouche
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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