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US Patent 9381613 Reinforcement ring for carrier head

Patent 9381613 was granted and assigned to Applied Materials on July, 2016 by the United States Patent and Trademark Office.

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Patent abstract

A reinforcement ring is for placement in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane. The reinforcement ring includes a substantially vertical cylindrical portion, a first flange projecting inwardly from the bottom of the cylindrical portion, and a second flange projecting outwardly from a bottom of the cylindrical portion. The second flange projects downwardly at a non-zero angle from vertical.

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