US Patent 9384997 Dry-etch selectivity
Patent 9384997 was granted and assigned to Applied Materials on July, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 22, 2015
Date of Patent
July 5, 2016
Patent Applicant
Patent Application Number
14602835
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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