Patent attributes
A FinFET comprises a substrate, an array of substantially parallel fins formed on the substrate and extending in a first direction, and an array of gates on the fins. First gates extend across the same fins of a first plurality of the fins in a second direction transverse to the first. Second gates extend across the same fins of a second plurality of fins in the second direction; the second gates having a length that is larger than that of the first gates. Third gates extend across the same fins of a third plurality of fins in the second direction; the third plurality of fins being located between the first and second pluralities. The third gates provide a transition between the first gates and the second gates in which a first portion of the third gates are dummies and a second portion are active devices such as pass gates.
