Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 26, 2016
Patent Application Number
13663449
Date Filed
October 29, 2012
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A bulk acoustic wave (BAW) resonator structure comprises a first electrode disposed over a substrate, a first piezoelectric layer disposed over the first electrode, a second electrode disposed over the first piezoelectric layer, and a collar structure disposed around a perimeter of an active region defined by an overlap between the first electrode, the second electrode, and the piezoelectric layer.
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