Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
August 16, 2016
Patent Application Number
14601407
Date Filed
January 21, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
In an optical measuring method, a reflected light from a structure on a substrate is detected by a measuring tool to obtain a raw spectrum. The raw spectrum in a wavelength range having spectrum sensitivity to process variation is analyzed to determine a process variation of an actual process performed on the substrate. The raw spectrum is corrected according to a spectrum offset for the measuring tool which is determined based on the process variation.
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