US Patent 9429939 Multivariate monitoring of a batch manufacturing process
Patent 9429939 was granted and assigned to MKS Instruments on August, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 6, 2012
Date of Patent
August 30, 2016
Patent Application Number
13441513
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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