Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hsiao-Chu Chen0
Yi-Shien Mor0
Mu-Chi Chiang0
Date of Patent
October 4, 2016
0Patent Application Number
146091800
Date Filed
January 29, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A device includes a substrate, an isolation region at a top surface of the substrate, and a semiconductor fin over the isolation region. The semiconductor fin has a fin height smaller than about 400 Å, wherein the fin height is measured from a top surface of the semiconductor fin to a top surface of the isolation region.
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