Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zuoqian Wang0
John M. White0
Date of Patent
October 11, 2016
Patent Application Number
14463254
Date Filed
August 19, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
An electromagnetic mask chuck is described herein. The electromagnetic mask chuck includes a body with a plurality of electromagnets formed therein. The electromagnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition. The electromagnets are controlled using a power source, to deliver a controlled magnetic field to the mask.
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