US Patent 9470703 Physical quantity sensor and electronic apparatus
Patent 9470703 was granted and assigned to Seiko Epson on October, 2016 by the United States Patent and Trademark Office.
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A physical quantity sensor includes: a substrate; a movable body including, with a first axis as a boundary, a first movable electrode portion disposed in a first region, a second movable electrode portion disposed in a second region, and a damping adjusting portion disposed in at least one of the first region and the second region; beam portions supporting the movable body; a first fixed electrode portion; and a second fixed electrode portion. A first through-hole is disposed in the damping adjusting portion. Second through-holes are disposed in the movable electrode portions. The area of a region where the first movable electrode portion overlaps with the first fixed electrode portion is the same as the area of a region where the second movable electrode portion overlaps with the second fixed electrode portion. The width of the first through-hole is greater than the widths of the second through-holes.
US Patent 09470703 Physical quantity sensor and electronic apparatus US Patent 9470703 Physical quantity sensor and electronic apparatus
US Patent 09470703 Physical quantity sensor and electronic apparatus
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