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US Patent 9472468 Nanowire CMOS structure and formation methods
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Patent
Date Filed
December 11, 2014
Date of Patent
October 18, 2016
Patent Application Number
14567252
Patent Citations Received
US Patent 11929253 SAG nanowire growth with a planarization process
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US Patent 12119224 SAG nanowire growth with ion implantation
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Patent Inventor Names
Gerben Doornbos
0
Aryan Afzalian
0
Mark van Dal
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Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
9472468
Patent Primary Examiner
Michelle Mandala
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