Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroshi Yoshimochi0
Yukichi Koji0
Mutsumi Nakanishi0
Date of Patent
October 25, 2016
0Patent Application Number
147258360
Date Filed
May 29, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A cleaning agent for a microelectronic device provided with metal wiring, which has an excellent ability to remove polishing particle residues derived from a polishing agent and an excellent ability to remove metallic residues on an insulating film, and has excellent anticorrosiveness to the metal wiring. The cleaning agent is used at a step subsequent to chemical mechanical polishing in a manufacturing process of a microelectronic device in which a metal wiring, e.g., copper or tungsten, is formed.
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