Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shih-Ming Chang0
Kuei-Liang Lu0
Date of Patent
November 22, 2016
Patent Application Number
14059328
Date Filed
October 21, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for feature pattern modification includes extracting both a main pattern and a cut pattern from a design pattern, the main pattern being laid out under a set of process guidelines that improve the process window during formation of the main pattern, and modifying at least one of: the main pattern and the cut pattern if either feature pattern is in violation of a layout rule.
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