Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 29, 2016
Patent Application Number
14556334
Date Filed
December 1, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
Provided is a substrate treating apparatus. The substrate treating apparatus includes a first unit, a second unit, a supply line connecting the first unit to the second unit to supply a supercritical fluid from the first unit to the second unit, a flow rate adjustment member disposed in the supply line, and a filter disposed in the supply line to remove foreign substances. The supply line disposed between the flow rate adjustment member and the filter is disposed to get out of a straight line.
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