Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert R. Robison0
Anthony I. Chou0
Joseph M. Lukaitis0
Sungjae Lee0
Date of Patent
December 27, 2016
0Patent Application Number
147483550
Date Filed
June 24, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods and structures for capacitively isolating a heat shield from a handle wafer of a silicon-on-insulator substrate. A contact plug is located in a trench extending through a trench isolation region in a device layer of the silicon-on-insulator substrate and at least partially through a buried insulator layer of the silicon-on-insulator substrate. The heat shield is located in an interconnect structure, which also includes a wire coupling the heat shield with the contact plug. An isolation structure is positioned between the contact plug and a portion of the handle wafer. The isolation structure provides the capacitive isolation.
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