Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David W. Madsen0
Fernando Gustavo Tomasel0
Gideon Van Zyl0
Date of Patent
January 3, 2017
0Patent Application Number
141881020
Date Filed
February 24, 2014
0Patent Citations Received
0
0
0
...
Patent Primary Examiner
Patent abstract
This disclosure describes systems, methods, and apparatus for ensuring desirable ignition of plasma in a plasma processing chamber via providing increased instantaneous power during an ignition period for both continuous wave (CW) and pulsed power delivery. The systems, methods, and apparatus can be applied to both initial ignition of a plasma and reignition of a plasma where pulsed power delivery leads to periodic extinction of the plasma.
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