Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Brent A. Anderson0
Edward J. Nowak0
Date of Patent
February 14, 2017
Patent Application Number
14965988
Date Filed
December 11, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
Vertical field effect transistors (FETs) with minimum pitch and methods of manufacture are disclosed. The structure includes at least one vertical fin structure and gate material contacting with the at least one vertical fin structure. The structure further includes metal material in electrical contact with the ends of the at least one vertical fin.
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