US Patent 9587749 Slit valve with a pressurized gas bearing
Is a
Date Filed
August 11, 2014
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Date of Patent
March 7, 2017
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Patent Application Number
14456258
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Patent Citations Received
Patent Inventor Names
Igor Krivts (Krayvitz)
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Paul Reuter
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William (Ty) Weaver
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Yoram Uziel
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Erez Admoni
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Israel Avneri
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Michael R. Rice
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Natan Schlimoff
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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