Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 14, 2017
Patent Application Number
14310182
Date Filed
June 20, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present disclosure provides one embodiment of an IC method that includes receiving an IC design layout, which has a plurality of main features and a plurality of space blocks. The IC method also includes calculating an optimized block dummy density ratio r0 to optimize an uniformity of pattern density (UPD), determining a target block dummy density ratio R, determining size, pitch and type of a non-printable dummy feature, generating a pattern for non-printable dummy features and adding the non-printable dummy features in the IC design layout.
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