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US Patent 9607805 Apparatus of plural charged-particle beams

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
May 10, 2016
Date of Patent
March 28, 2017
Patent Application Number
15150858
Patent Citations Received
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US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
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US Patent 12087542 Image contrast enhancement in sample inspection
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
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US Patent 11657999 Particle beam system and method for the particle-optical examination of an object
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US Patent 11670477 Apparatus using charged particle beams
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US Patent 11688580 Apparatus of plural charged-particle beams
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US Patent 11804356 Apparatus using multiple beams of charged particles
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US Patent RE49784 Apparatus of plural charged-particle beams
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US Patent 11887807 Apparatus of plural charged-particle beams
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US Patent 11935721 System comprising a multi-beam particle microscope and method for operating the same
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9607805
Patent Primary Examiner
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David E Smith

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