US Patent 9613846 Pad design for electrostatic chuck surface
Patent 9613846 was granted and assigned to Applied Materials on April, 2017 by the United States Patent and Trademark Office.
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Patent abstract
Embodiments are directed to an electrostatic chuck surface having minimum contact area features. More particularly, embodiments of the present invention provide an electrostatic chuck assembly having a pattern of raised, elongated surface features for providing reduced particle generation and reduced wear of substrates and chucking devices.
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US Patent 09613846 Pad design for electrostatic chuck surface US Patent 9613846 Pad design for electrostatic chuck surface
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Patent Number
0961384600
Patent Number
961384600
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
096138460
Date of Patent
April 4, 2017
0Patent Application Number
145501060
Date Filed
November 21, 2014
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
096138460
Date of Patent
April 4, 2017
0Patent Application Number
145501060
Date Filed
November 21, 2014
0Official Website
Patent Primary Examiner
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US Patent 09613846 Pad design for electrostatic chuck surface
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
09613846
Date of patent
April 4, 2017
Patent application number
14550106
Date Filed
November 21, 2014
Patent primary examiner
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