US Patent 9627181 Plasma processing apparatus
Patent 9627181 was granted and assigned to Tokyo Electron on April, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 27, 2011
0
Date of Patent
April 18, 2017
0
Patent Application Number
13246049
0
Patent Inventor Names
Yohei Yamazawa
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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