US Patent 9627375 Indented gate end of non-planar transistor

In some embodiments, a semiconductor structure includes a substrate, a dielectric region, a non-planar structure and a gate stack. The dielectric region is formed on the substrate, and has a top surface. The non-planar structure protrudes from the top surface, and includes a channel region, and source and drain regions formed on opposite sides of the channel region. The gate stack is formed on the top surface, wraps around the channel region, and includes a gate top surface, and a gate side wall that does not intersect the non-planar structure. The gate side wall has a first distance from a vertical plane at a level of the top surface, and a second distance from the vertical plane at a level of the gate top surface. The vertical plane is vertical with respect to the top surface, and intersects the non-planar structure. The first distance is shorter than the second distance.