US Patent 9663346 MEMs-based resonant FinFET
Is a
Date Filed
February 17, 2016
0
Date of Patent
May 30, 2017
0
Patent Application Number
15046245
0
Patent Citations Received
Patent Inventor Names
Bichoy Bahr
0
Zoran Krivokapic
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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