US Patent 9673027 Test apparatus and plasma processing apparatus
Patent 9673027 was granted and assigned to Tokyo Electron on June, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 22, 2014
Date of Patent
June 6, 2017
Patent Applicant
Patent Application Number
14161538
Patent Citations Received
Patent Inventor Names
Takashi Yamamoto
0
Junichi Shimada
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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