Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ramesh Chandrasekharan0
Jennifer L. Petraglia0
Date of Patent
June 13, 2017
Patent Application Number
13934597
Date Filed
July 3, 2013
Patent Citations Received
0
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Patent Primary Examiner
Patent abstract
A dual-temperature, multi-plenum showerhead for use in semiconductor processing equipment is described. The showerhead may supply multiple separate gases to a wafer reaction area while keeping the gases largely segregated within the showerhead. Additionally, the showerhead may be configured to allow a faceplate of the showerhead to be maintained at a significantly higher temperature than the rest of the showerhead.
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