Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 13, 2017
Patent Application Number
15336589
Date Filed
October 27, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
Embodiments of the present invention provide a method for self-aligned metal cuts in a back end of line structure. Sacrificial Mx+1 lines are formed above metal Mx lines. Spacers are formed on each Mx+1 sacrificial line. The gap between the spacers is used to determine the location and thickness of cuts to the Mx metal lines. This ensures that the Mx metal line cuts do not encroach on vias that interconnect the Mx and Mx+1 levels. It also allows for reduced limits in terms of via enclosure rules, which enables increased circuit density.
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