Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 20, 2017
Patent Application Number
14933409
Date Filed
November 5, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
Techniques for increasing efficiency of thermo-optic phase shifters using multi-pass heaters and thermal bridges are provided. In one aspect, a thermo-optic phase shifter device includes: a plurality of optical waveguides formed in an SOI layer over a buried insulator; at least one heating element adjacent to the optical waveguides; and thermal bridges connecting at least one of the optical waveguides directly to the heating element. A method for forming a thermo-optic phase shifter device is also provided.
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