Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Erwin Lang0
Thilo Reusch0
Philipp Schwamb0
Date of Patent
June 27, 2017
0Patent Application Number
144171690
Date Filed
July 18, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus may include a first support covered with at least one ALD precursor and/or at least one MLD precursor, and a second support covered with at least one ALD precursor and/or at least one MLD precursor which is/are complementary to the ALD precursor and/or MLD precursor of the first support. The first support is at least partly joined to the second support by an atomic bond between the ALD precursor of the first support and the ALD precursor of the second support or between the MLD precursor of the first support and the MLD precursor of the second support in such a way that an ALD layer or an MLD layer is formed.
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