US Patent 9711456 Composite manganese nitride/low-K dielectric cap
Is a
Date Filed
December 19, 2015
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Date of Patent
July 18, 2017
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Patent Application Number
14975729
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Patent Citations Received
Patent Inventor Names
Donald F. Canaperi
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Takeshi Nogami
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Deepika Priyadarshini
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Son V. Nguyen
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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