Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naohiro Takazawa0
Yoshiaki Takemoto0
Date of Patent
July 25, 2017
Patent Application Number
14822197
Date Filed
August 10, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor substrate includes: an alignment mark being formed of a material that reflects a detection light for detecting positions and having a detection edge portion; a light-shielding layer portion having a larger outer shape than the alignment mark, being formed of a material that shields the detection light, and being disposed at a position on a backside of the alignment mark when seen from an incidence side of the detection light; and one or more light-transmitting layer portions being laminated between the alignment mark and the light-shielding layer portion so as to transmit the detection light and not being patterned at least in a range that overlaps the light-shielding layer portion.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
