Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shigekazu Tomai0
Yuki Tsuruma0
Kazuaki Ebata0
Shigeo Matsuzaki0
Date of Patent
September 19, 2017
Patent Application Number
14343031
Date Filed
September 6, 2012
Patent Citations Received
Patent Primary Examiner
Patent abstract
A sputtering target including a sintered body:the sintered body including:indium oxide doped with Ga or indium oxide doped with Al, anda positive tetravalent metal in an amount of exceeding 100 at. ppm and 1100 at. ppm or less relative to the total of Ga and indium, or Al and indium,the crystal structure of the sintered body substantially including a bixbyite structure of indium oxide.
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