US Patent 9779956 Hydrogen activated atomic layer etching
Patent 9779956 was granted and assigned to Lam Research on October, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 6, 2017
0
Date of Patent
October 3, 2017
0
Patent Applicant
Patent Application Number
15425899
0
Patent Inventor Names
Alan Jensen
0
Xin Zhang
0
Gerardo Delgadino
0
Daniel Le
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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