Patent attributes
A recess 22 provided in a passage block 20; a diaphragm covering the recess 22 to form a valve chest 21 in which a fluid flows; an inflow port 23 opened at the recess 22 and allowing the fluid to flow into the valve chest 21; an NC outflow port 24 and an NO outflow port 25 opened at the recess 22 and allowing the fluid to flow out from the valve chest 21; by oscillating the diaphragm, the diaphragm is closely fitted to any one of a first valve seat 24b formed by an opening 24a of the NC outflow port 24 and a second valve seat 25b formed by an opening 25a of the second outflow port 25, to allow the fluid in the valve chest 21 to flow out from the other outflow port. The recess 22 has a first inclined portion 81 and a second inclined portion 82 having a depth gradually increasing from the first valve seat 24b and the second valve seat 25b toward the inflow opening 23.
