US Patent 9805915 Plasma processing apparatus
Patent 9805915 was granted and assigned to Hitachi on October, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 4, 2011
0
Date of Patent
October 31, 2017
0
Patent Application Number
13020991
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Patent Inventor Names
Megumu Saitou
0
Masaharu Gushiken
0
Ryoji Nishio
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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