US Patent 9805965 Pixelated capacitance controlled ESC
Patent 9805965 was granted and assigned to Applied Materials on October, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 30, 2016
Date of Patent
October 31, 2017
Patent Applicant
Patent Application Number
15395938
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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