Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 7, 2017
Patent Application Number
15029285
Date Filed
September 23, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. First container is enclosed within a hermetically sealed second container. Any ozone generated within the second container as a result of ultraviolet components of the output radiation is completely contained within the second container. Second container further filters out the ultraviolet components. Microwave radiation may be used instead of laser radiation to form the plasma.
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