Patent 9817164 was granted and assigned to LUMILANT, INC. on November, 2017 by the United States Patent and Trademark Office.
According to embodiments of the invention, the design and fabrication of a binary superimposed grating (BSG) results in better performing devices that may be fabricated using existing technology. The fabrication process includes forming grating features based upon repeating features of the desired superposition function. The design process also relaxes the processing requirement for equivalently performing devices.