Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 14, 2017
Patent Application Number
14387390
Date Filed
July 2, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
An Oxide TFT, a preparation method thereof, an array substrate and a display device are described. The method includes forming a gate electrode, a gate insulating layer, a channel layer, a barrier layer, as well as a source electrode and a drain electrode on a substrate; the channel layer is formed by depositing an amorphous oxide semiconductor film in a first mixed gas containing H2, Ar and O2. By depositing a channel layer in a first mixed gas containing H2, Ar and O2, the hysteresis phenomenon of the TFT can be mitigated effectively to improve the display quality of the display panel.
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