US Patent 9865447 High brightness laser-sustained plasma broadband source
Patent 9865447 was granted and assigned to KLA-Tencor on January, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 4, 2016
Date of Patent
January 9, 2018
Patent Applicant
Patent Application Number
15285333
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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