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US Patent 9869012 Ion assisted deposition for rare-earth oxide based coatings

Patent 9869012 was granted and assigned to Applied Materials on January, 2018 by the United States Patent and Trademark Office.

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Patent abstract

A method of manufacturing an article comprises performing ion assisted deposition (IAD) to deposit a protective layer on at least one surface of the article, wherein the protective layer is a plasma resistant rare earth oxide film having a thickness of less than 300 μm and an average surface roughness of 10 micro-inches or less.

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