Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cherng-Shyan Tsay0
Bo-Han Chen0
Chia-Cheng Chang0
Chien Wen Lai0
Chin-Min Huang0
Hua-Tai Lin0
Lun-Wen Yeh0
Shun-Shing Yang0
Date of Patent
January 16, 2018
0Patent Application Number
149497130
Date Filed
November 23, 2015
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
Provided is an integrated circuit (IC) design method. The method includes receiving a design layout of the IC, the design layout having a first main feature, and adding a negative assist feature to the design layout, wherein the negative assist feature has a first width, the negative assist feature divides the first main feature into a second main feature and a third main feature by the first width, and the first width is sub-resolution in a photolithography process.
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