US Patent 9885117 Conditioned semiconductor system parts
Patent 9885117 was granted and assigned to Applied Materials on February, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 11, 2015
Date of Patent
February 6, 2018
Patent Applicant
Patent Application Number
14619474
Patent Citations Received
Patent Inventor Names
Sung Je Kim
0
Dmitry Lubomirsky
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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