Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 13, 2018
Patent Application Number
14872627
Date Filed
October 1, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
A BEOL e-fuse is disclosed which reliably blows in the via and can be formed even in the tightest pitch BEOL layers. The BEOL e-fuse can be formed utilizing a line first dual damascene process to create a sub-lithographic via to be the programmable link of the e-fuse. The sub-lithographic via can be patterned using standard lithography and the cross section of the via can be tuned to match the target programming current.
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