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US Patent 9909983 Method and apparatus for improving measurement accuracy

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
0
Date Filed
February 2, 2016
0
Date of Patent
March 6, 2018
0
Patent Application Number
15013348
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Patent Citations Received
‌
US Patent 11713959 Overlay metrology using spectroscopic phase
0
Patent Inventor Names
Nitesh Pandey
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
9909983
0
Patent Primary Examiner
‌
Jonathan Hansen
0

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